Abstract

The subject of this site is detailed documentation of the process of fabricating various MEMS structures. It is meant to provide a basis for further research on cost modeling and process compatibility issues associated with the fabrication of micromechanical and active semiconductor devices.

Presently, micromachining of silicon is a well-established technology for sensor and biomedical applications. But its potentials can provide many benefits for the design of miniaturized high frequency circuits. These circuits are of essential importance to communication and radar systems, and their further integration can greatly improve a variety of possible applications.

In the chapter "MEMS", general information on micromachining is given. The different techniques are explained, and common tools in context with micromachining processes are discussed.