List of Abbreviations

ACE Acetone
DI H2O Deionized Water
FGCPW Finite Ground Coplanar Waveguide
HBT Heterojunction Bipolar Transistor
IEEE Institute of Electrical And Electronics Engineers
IPA Isopropyl Alcohol
MEMS Microelectromechanical Systems
MMIC Monolithic Microwave Integrated Circuit
MTT-S Microwave Theory And Techniques Society
PECVD Plasma-Enhanced Chemical Vapor Deposition
PR Photoresist
sccm Standard Cubic Centimeters per Minute
VLSI Very Large Scale Integration