List of Abbreviations
ACE | Acetone |
DI H2O | Deionized Water |
FGCPW | Finite Ground Coplanar Waveguide |
HBT | Heterojunction Bipolar Transistor |
IEEE | Institute of Electrical And Electronics Engineers |
IPA | Isopropyl Alcohol |
MEMS | Microelectromechanical Systems |
MMIC | Monolithic Microwave Integrated Circuit |
MTT-S | Microwave Theory And Techniques Society |
PECVD | Plasma-Enhanced Chemical Vapor Deposition |
PR | Photoresist |
sccm | Standard Cubic Centimeters per Minute |
VLSI | Very Large Scale Integration |