List of Abbreviations
| ACE | Acetone |
| DI H2O | Deionized Water |
| FGCPW | Finite Ground Coplanar Waveguide |
| HBT | Heterojunction Bipolar Transistor |
| IEEE | Institute of Electrical And Electronics Engineers |
| IPA | Isopropyl Alcohol |
| MEMS | Microelectromechanical Systems |
| MMIC | Monolithic Microwave Integrated Circuit |
| MTT-S | Microwave Theory And Techniques Society |
| PECVD | Plasma-Enhanced Chemical Vapor Deposition |
| PR | Photoresist |
| sccm | Standard Cubic Centimeters per Minute |
| VLSI | Very Large Scale Integration |