References

Books:

[1] Marc Madou: Fundamentals of Microfabrication. CRC Press LLC, London, 1997

[2] Sorab K. Ghandhi: VLSI Fabrication Principles - Silicon and Gallium Arsenide. John Wiley & Sons, New York, 1983, TK 7874.G473 1983

[3] William S. Trimmer: Micromechanics and MEMS - Classic and Seminal Papers to 1990. IEEE Press, New York, 1997, TK 7874.M4876 1997

[4] S. A. Campbell, H. J. Lewerenz: Semiconductor Micromachining (Vol. 1 & 2). John Wiley & Sons, New York, 1998, TK 7871.85.S4295 1998

[5] Saburo Nonogaki, Takumi Ueno, Toshio Ito: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology. Marcel Dekker, Inc., New York, 1998, TK 7871.85.N66 1998

[6] Gary E. McGuire: Semiconductor Materials and Process Technology Handbook. Noyes Publications, Park Ridge, 1988, TK 7874.S4178 1988

Papers:

[7] Sergio Pacheco, Clark T. Nguyen, Linda P. B. Katehi: "Micromechanical Electrostatic K-Band Switches", IEEE MTT-S Digest, pp. 1569-1572, 1998

[8] Linda P. B. Katehi, Gabriel M. Rebeiz, Clark T.-C. Nguyen: "MEMS and Si-Micromachined Components for Low-Power, High-Frequency Communications Systems", IEEE MTT-S Digest, pp. 331-333, 1998

[9] Stephen V. Robertson, Mehran Matloubian, Michael Case, Linda P. B. Katehi: "A Si Micromachined Conformal Package for a K-Band Low Noise HEMT Amplifier", IEEE MTT-S Digest, pp. 517-520, 1997

[10] Rhonda Franklin Drayton, Linda P. B. Katehi: "Development of Self-Packaged High Frequency Circuits Using Micromachining Techniques", IEEE Trans. on Microwave Theory and Techniques, vol. 43, no. 9, pp. 2073-2080, Sep. 1995

[11] Linda P. B. Katehi, Gabriel M. Rebeiz, Thomas M. Weller, Rhonda F. Drayton, Heng-Ju Cheng, John F. Whitaker: "Micromachined Circuits for Millimeter- and Sub-millimeter-Wave Applications", IEEE Antennas and Propagation Magazine, vol. 35, no. 5, pp. 9-17, Oct. 1993

[12] John Papapolymerou, Jui-Ching Cheng, Jack East, Linda P. B. Katehi: "A Micromachined High-Q X-Band Resonator", IEEE Microwave and Guided Wave Letters, vol. 7, no. 6, pp. 168-170, Jun. 1997

[13] Stephen V. Robertson, Linda P. B. Katehi, Gabriel M. Rebeiz: "Micromachined Self-Packaged W-Band Bandpass Filters", IEEE MTT-S Digest, pp. 1543-1546, 1995

[14] Kirt R. Williams, Richard S. Muller: "Etch Rates for Micromachining Processing", Journal of Microelectromechanical Systems, vol. 5, no. 4, pp. 256-269, 1996

Internet:

[15] Sandia National Laboratories Image Gallery: http://www.mdl.sandia.gov/Micromachine/images9.html

[16] IMM LIGA Technology page: http://www.imm-mainz.de/english/sk_a_tec/basic_te/liga.html

[17] MCNC Multi-User LIGA homepage: http://mems.mcnc.org/liga3.html

[18] Danny Banks - Microengineering and MEMS: http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html

[19] The MEMS Clearinghouse Homepage: http://mems.isi.edu/

[20] MEMS Ressources - trimmer.net: http://www.trimmer.net/

[21] Univ. of Colorado @ Boulder - CAMPmode MEMS: http://www.colorado.edu/engineering/MEMS/

[22] Fundamentals of Microfabrication - Links per Chapter: http://www.er6.eng.ohio-state.edu/~madou/mems/www.html

Personel at the University of Michigan:
 

Prof. Dr. Linda P. B. Katehi (supervisor): katehi@engin.umich.edu

Sergio Pacheco (Compliant Switch): pacheco@engin.umich.edu

Jeremy Muldavin (High Isolation Switch): muldavin@engin.umich.edu

Lee Harle (Micromachined Filters, Transmission Lines): leeharle@engin.umich.edu

Katherine Herrick (Transmission Lines): kherrick@engin.umich.edu
 

All are with

The Radiation Laboratory
Electrical Engineering and Computer Sciences Department
The University of Michigan
Ann Arbor, MI 48109-2122