Table of Contents

I. Introduction

a. Definition of Yield

b. Definition of Yield Modeling

c. Parametric Yield

d. Random Defect Yield

II. Defect Definition

a. Definition of Defect

III. Circuit Critical Area

a. Defect Size Distribution

b. Fault Probability Kernel

c. Critical Area

IV. Yield Models and Equations

V. Simple Random Defect Model

VI. Compound Poisson Statistics

a. Fatal Defects and Murphy’s Formula

VII. Distribution Functions

a. Delta Function

b. Triangle Function

c. Exponential Function

d. Rectangle Function

e. Gamma Function

VIII. Yield with Repair Capabilities

a. Yield Equations

b. Support Area Yield

c. Core Area Yield

d. Die Yield

IX. Effects of Repair on Yield

X. Clustering Effects on Wafer Scale Yields

a. Intrawafer Defect Density Variation

b. Interwafer Defect Density Variation

XI. Summary