_______ Layout for smart chemfet fluid sensor for 1.6 micron technology____
 VLSI MAGIC layout of a chemfet fluid sensor; the sensor is at the upper right of the lower left middle (bridge) circuit with various levels of the sensor for testing at the lower right and left; the fluid acts as the dielectric in a PMOS transistor for which the oxide is etched out using the holes cut in the gate. Other components are a neural type cell (middle right) for making a smart sensor, a differential pair (top left) for amplification and interfacing, and a ring oscillator (top right) for self-test.
















------------------------------

  • chemfet paper for iscas2002 (iscas02_chem031202.pdf) here

    and related architecture paper (iscas02_arch031202.pdf) here

  • Link back to Microsystems Laboratory VLSI circuits page here