Keyboard freezes:

• Reboot computer:
• Power-down computer
• Power-up computer
• Menu: <DX_disk_files> <DX1:data_file> <Jobfiles.ddx>
• Menu: <Operate_stepper> <Start_with_defaults>

Stage goes to "LIMIT" or can't ORIGinate:

• Check state of the stage laser interferometer with its panel lights. The four LEDs should be lit, top to bottom, 3 yellows and a green.
• Make sure that the stage control module is on.
• Issue CTRL + Q keyboard control.
• Press the stage LIMIT button just inside the chamber, left-front.
• Reboot the computer.
• Issue the ORIG keyboard command.
• Check the state of the laser interferometer.

Joysticks non-responsive:

• Because the stepper's isolation table cannot always immediately adjust to floor vibration originating from the vacuum pumps in the gas chase, the stage alignment lasers often need extra time to locate the stages. Therefore, their response when performing a wafer alignment is often very sluggish, and the operator will often have to wait for up to 30 seconds after each joystick movement or scope toggling before the system will respond to stage movement commands.