Micromachined RF Technology (Manufacturing Process Identification and Evaluation)

[Introduction] | [CALCE Role] | [Progress]

Introduction

The objective of this program is to lay the ground work for the future implemenation of a Transmit Receive (TR) module on a single chip.  In order to fabricate a TR module on a chip, compatible processes for fabricating high-speed transistors, MMIC, and MEMS must be developed and applied to a single wafer.

CALCE Role

CALCE-EPSC is a subcontractor of the NASA Jet Propulsion Laboratory (JPL) on this program.  CALCE will evaluate the manufacturing processes associated with fabricating advanced high-frequency modules composed of a combination of micromachined (MEMs) and electronic solid state components (Si/Ge HBTs). Evaluation of the manufacturing processes includes identification of the process steps, evaluating compatibility of the necessary processing, cost analysis, and yield analysis.

Phase 1 - Baseline Process Modeling and Process Compatibility Evaluation

• Task 1.1 - Process Identification

• Task 1.2 - Process Compatibility Evaluation

• Task 1.3 - Process Model (Cost and Yield Analysis)

Phase 2 - Extensions to Baseline Models and Industry Evaluation of Processes

• Task 2.1 - Test and Rework

• Task 2.2 - Optical Interfaces

• Task 2.3 - Industrial Evaluation

Progress

Process models for RF MEMS structures

Process models for Si/Ge HBTs - Under construction