Erin Cleveland

Search this site

Welcome To My Site

Welcome to the homepage of Erin Cleveland (formerly Erin Robertson). I am a Ph.D. candidate at the University of Maryland at College Park under the advising of Dr. Gary W. Rubloff.

During my time at Maryland I have researched various topics such as: advanced process control for Galium-Nitride Metal Organic Chemical Vapor Deposition (MOCVD), reactor design & process optimization of Hafnium-Oxide Atomic Layer Deposition (ALD), design and implementation of Titanium-Nitride ALD system, microfabrication of a high temperature Fabry-Perot pressure sensor, development of in-situ sensing of microfluidic channels, reactor design and process optimization of Titanium Oxide ALD for ultra-high aspect nanostructures, process development of Titanium Oxide and Hafnium Oxide on a commercial ALD system.

More socially, I am the founder and current president of UMD's Materials Science Graduate Society (MSGS). We are an active student chapter of the Materials Research Society (MRS). In addition, I am a member of the Material Advantage Society - a combination of TMS, ASM, Acers, AIST, the American Vacuum Society (AVS), and an active participant in NIST's Adventures In Science (AIS) program.

I enjoy spending any free time on an adventure with my wonderful husband, Ernie, and relaxing with a good book and our precious cat, Kara.



Research Highlights

Bottom of a Titanium Oxide coated Anodic Aluminum Oxide (AAO) template.

My current research focus is on Atomic Layer Deposition (ALD) and its behavior in ultra-high aspect ratio nanostructures.

more research



Quick Links